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MS-500 Item No:MS-500

MS-500Item No:MS-500

Up to 8 points can be measured simultaneously
A wide concentration display of 100% from ppm level is possible.
Ideal for mounting in semiconductor manufacturing equipment, vacuum equipment, etc.
Sensor is a direct insertion type (NW flange for vacuum 16/25/40)
Provide special coating on high endurance sensor, further improve durability

MS-500_Specifications

Measurement principle

Battery-powered zirconia oxygen analyzer

Type

Separate-type (converter: wall-mounted; sensor: direct insertion type)

Display system

4-digit digital display (concentration display)

Measurement range

0-1 / 10 / 100 / 1000ppm / 1 / 10 / 100vol%O2; 10-20 to 10-0atm
Automatic range

Repeatability

Within ±0.5% of full scale; range of 0-1% or more
Within ±1% of full scale or ±0.1ppm, whichever is larger; range of less than 0-1%
Concentrations in the range of 0-1ppm, atm are not under the warranty range

Number of measurement points

1-8

Sample gas requirements

Pressure: 10-3-200KPa(absolute pressure)

Flow rate: 0.5-5,000mL/min or 0mL/min (measurement in state of natural dispersion)

Humidity: Dew point below ambient temperature

Temperature: 0-100℃

Others: Not to contain corrosive gas (fluorine gas, chlorine gas, sulfuric gas, etc.), gas containing organic silicone, flammable ingredients (including gas), oil or moisture

Reference gas

Atmospheric air

Recorder output

Transmission output only

Transmission output

RS-232C

Alarm output

None

Warmup time

Under 6 min.

Dimensions

MS-500 (controller): 92(W)×44(H)×120(D)mm (excludes protruding parts)
MS-510 (converter): 100(W)×40(H)×88(D)mm (excludes protruding parts)
Sensor unit:
SD16NW: Overall length 100mm (sensor Φ 11×39, body Φ 40×51)
SD25NW: Overall length 100mm (sensor Φ 11×42, body Φ 40×48)
SD40NW: Overall length 100mm (sensor Φ 11×41, body Φ 40×49)

Weight

MS-500 (controller): Approx. 0.6 kg
MS-510 (converter): Approx. 0.5 kg
Sensor unit:
SD16NW: Approx. 0.2 kg
SD25NW: Approx. 0.2 kg
SD40NW: Approx. 0.35 kg

External connection

Any of the vacuum flanges (NW16, 25 or 40)

Power

24VDC±10%